Thermal Mass Flow Controllers & Meters for the Harshest Environments

Thermal Mass Flow Controllers & Meters for the Harshest Environments

Thermal Mass Flow Controllers (MFCs) play a crucial role in process control applications by precisely and accurately controlling gas flow rates in various processes. They are used across multiple industries and applications to ensure stable, repeatable, and efficient process conditions. Some of the critical areas where Thermal MFCs are applied include:


  1. Semiconductor Manufacturing: In semiconductor fabrication processes, such as chemical vapor deposition (CVD) and plasma etching, MFCs control the flow of process gases to maintain accurate gas ratios and reactant concentrations, ensuring consistent wafer quality.
  2. Pharmaceutical and Biotechnology: MFCs apply in processes such as fermentation, cell culture, and gas chromatography, where they regulate the flow of gases like oxygen, carbon dioxide, and nitrogen to maintain optimal growth conditions for biological cultures or to separate and analyze various compounds.
  3. Chemical Processing: In chemical synthesis and reaction control, MFCs manage the flow of reactants and carrier gases to maintain the proper stoichiometry and reaction conditions, ensuring high-quality product yields and safe operations.
  4. Solar Cell Manufacturing: MFCs apply in processes such as thin-film deposition and chemical etching, where they control the flow of process gases to create uniform layers and achieve precise etching profiles for high-efficiency solar cells.
  5. Fuel Cell Development: In fuel cell research and manufacturing, MFCs regulate the flow of hydrogen, oxygen, and other gases to maintain optimal conditions for efficient energy production and long-lasting performance.
  6. Environmental Monitoring: MFCs are used in air quality monitoring and emissions testing systems to control the flow of calibration gases, ensuring accurate measurements and compliance with environmental regulations.
  7. Laboratory Research: In various research applications, such as mass spectrometry, gas chromatography, and flow chemistry, MFCs provide precise control over gas flow rates for accurate analysis and experimental conditions.


Thermal Mass Flow Controllers are essential components in process control systems, providing the accuracy, precision, and repeatability required for maintaining optimal process conditions and ensuring high-quality results across diverse industries and applications.


Brooks Instrument SLAMf Series Thermal Mass Flow Controller


The Brooks Instrument SLAMf Series Thermal Mass Flow Controller is an innovative and cutting-edge solution for accurately controlling and measuring gas flow in a wide range of industries and applications. This state-of-the-art flow controller meets the highest performance, reliability, and flexibility standards, ensuring seamless integration into your process control systems.


The SLAMf Series boasts several unique features that set it apart from its competitors. With its patented MultiFlo™ technology, users can easily configure the controller for multiple gases and flow ranges without sacrificing accuracy or requiring recalibration. This results in a highly versatile device capable of meeting the demands of diverse applications.


Another standout feature of the SLAMf Series is its ultra-fast response time, facilitated by the advanced sensor design and high-speed digital signal processing. It ensures that your processes are consistently controlled with precision, minimizing the risk of variations and improving overall efficiency.


The robust construction and corrosion-resistant materials used in the SLAMf Series make it suitable for even the most challenging environments. Its compact design allows easy installation in tight spaces, making it an ideal choice for various industries, such as semiconductor manufacturing, pharmaceuticals, chemical processing, and research facilities.


Typical applications for the Brooks Instrument SLAMf Series Thermal Mass Flow Controller include gas mixing and blending, gas delivery, process control, and environmental monitoring. With its unparalleled performance, adaptability, and durability, the SLAMf Series is the ultimate choice for professionals seeking the best in flow control technology.


Miller Energy, Inc.
800-631-5454
https://millerenergy.com